1
      As filed with the Securities and Exchange Commission on May 30, 2001
                                                           Registration No. 333-
================================================================================

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM S-8

                             REGISTRATION STATEMENT
                                    UNDER THE
                             SECURITIES ACT OF 1933

                             BROOKS AUTOMATION, INC.
             ------------------------------------------------------
             (Exact Name of Registrant as Specified in Its Charter)

          Delaware                                               04-3040660
-------------------------------                           ----------------------
(State or Other Jurisdiction of                              (I.R.S. Employer
 Incorporation or Organization)                           Identification Number)

                    15 Elizabeth Drive, Chelmsford, MA 01824
               ---------------------------------------------------
               (Address of Principal Executive Offices) (Zip Code)


                             BROOKS AUTOMATION, INC.
      2001 RESTRICTED STOCK PURCHASE PLAN FOR KLA PRODUCT LINE ACQUISITION
      --------------------------------------------------------------------
                            (Full Title of the Plan)

            ROBERT J. THERRIEN, PRESIDENT AND CHIEF EXECUTIVE OFFICER
                             BROOKS AUTOMATION, INC.
                               15 ELIZABETH DRIVE
                              CHELMSFORD, MA 01824
            ---------------------------------------------------------
                     (Name and Address of Agent For Service)

                                 (978) 262-2400
          -------------------------------------------------------------
          (Telephone Number, Including Area Code, of Agent For Service)

                         CALCULATION OF REGISTRATION FEE


=============================================================================================================
                                                                      Proposed
                                               Proposed               Maximum
Title of                                       Maximum                Aggregate
Securities to          Amount to               Offering Price         Offering              Amount of
be Registered          be Registered           Per Share(1)           Price(1)              Registration Fee
-------------          -------------           --------------         ---------             ----------------

                                                                                   
Common Stock,             50,000(2)            $  51.89               $2,594,500               $648.63
$.01 par value

Preferred Share           50,000                ___________           __________              _________
Purchase Rights(3)
=============================================================================================================


(1)  Estimated solely for the purpose of determining the registration fee
     pursuant to Rule 457(h) under the Securities Act of 1933, on the basis of
     the average high and low prices for the Registrant's common stock on the
     Nasdaq National Market on May 29, 2001.

(2)  Such presently indeterminable number of additional shares of common stock
     are registered hereunder as may be issued in the event of a merger,
     consolidation, reorganization, recapitalization, stock dividend, stock
     split, stock combination, or other similar changes in the common stock.


   2


(3)  On July 23, 1997, the Board of Directors of the Registrant declared a
     dividend of one preferred share purchase right for each share of common
     stock outstanding on August 21, 1997. The 50,000 rights registered by
     this Registration Statement represent one right that may be issued in
     connection with each share of common stock awarded under the Registrant's
     2001 Restricted Stock Purchase Plan for KLA Product Line Acquisition. Such
     presently indeterminable number of rights are also registered by this
     Registration Statement as may be issued in the event of a merger,
     consolidation, reorganization, recapitalization, stock dividend, stock
     split or other similar change in common stock. The rights are not
     separately transferable apart from the common stock, nor are they
     exercisable until the occurrence of certain events. Accordingly, no
     independent value has been attributed to the rights.


   3


                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

ITEM 3. INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

     The following documents are hereby incorporated by reference into this
Registration Statement:

     (a) The Company's Annual Report on Form 10-K for the fiscal year ended
September 30, 2000;

     (b) The Registrant's Quarterly Report on Form 10-Q for the three months
ended December 31, 2000;

     (c) The Registrant's Quarterly Report on Form 10-Q for the three months
ended March 31, 2001;

     (d) All other reports filed pursuant to 13(a) or 15(d) of the Securities
Exchange Act of 1934 (the "1934 Act") since the end of the fiscal year covered
by the annual report referred to in (a) above;

     (e) The description of the Registrant's Common Stock contained in the
Registrant's Registration Statement on Form 8-A (File No. 0-25434) filed under
the Securities Exchange Act of 1934, as amended (the "Exchange Act") including
any amendment or report filed for the purpose of updating such description;

     (f) The description of the Registrant's Common Stock contained in the
Registrant's Registration Statement on Form S-1 (File No. 33-87296) filed under
the 1933 Act.

     All documents filed by the Registrant pursuant to Sections 13(a), 13(c), 14
and 15(d) of the Exchange Act, subsequent to the date hereof and prior to the
filing of a post-effective amendment which indicates that all securities offered
have been sold or which deregisters all securities then remaining unsold, shall
be deemed hereby incorporated by reference in this Registration Statement and to
be a part hereof from the date of filing of such documents.

ITEM 4. DESCRIPTION OF SECURITIES.

     Not applicable.

ITEM 5. INTERESTS OF NAMED EXPERTS AND COUNSEL.

     The validity of the securities offered hereby has been passed upon for the
Registrant by Messrs. Brown, Rudnick, Freed & Gesmer, One Financial Center,
Boston, Massachusetts 02111.

ITEM 6. INDEMNIFICATION OF DIRECTORS AND OFFICERS.

     Article Ninth of the Registrant's Certificate of Incorporation eliminates
the personal liability of directors of the Registrant or its stockholders for
monetary damages for breach of fiduciary duty to the full extent permitted by
Delaware law. Article VII of the Registrant's Bylaws provides that the
Registrant may indemnify its officers and directors to the full extent permitted
by the Delaware General Corporation Law. Section 145 of the Delaware General
Corporation Law authorizes a corporation to indemnify directors, officers and
employees unless such party has been adjudicated in any proceeding not to have
acted in good faith in the reasonable belief that his action was in the best
interest of the corporation. The Registrant also maintains directors and
officers liability insurance.

ITEM 7. EXEMPTION FROM REGISTRATION CLAIMED.

     Not applicable.



                                      II-1
   4
ITEM 8. EXHIBITS.

     4.2  Description of Capital Stock (contained in the Certificate of
          Incorporation, as amended, of the Registrant, filed as Exhibit 3.01 to
          the Registrant's Quarterly Report on Form 10-Q).*

     4.3  Rights Agreement, dated July 23, 1997.**

     5.1  Legal Opinion of Brown, Rudnick, Freed & Gesmer.

    23.1  Consent of PricewaterhouseCoopers LLP

    23.2  Consent of Brown, Rudnick, Freed & Gesmer (included in its legal
          opinion filed as Exhibit 5.1 to this Registration Statement).

    24    Power of Attorney (included on the signature page of this Registration
          Statement).

    99.4  Registrant's 2001 Restricted Stock Purchase Plan for KLA Product Line
          Acquisition.

---------
* Incorporated by reference to the Registrant's Quarterly Report on Form 10-Q
for the quarterly period ended March 31, 2000. The number assigned to each
Exhibit above is the same as the number assigned to the Exhibit in the Quarterly
Report.

** Incorporated by reference to the Registrant's Registration Statement on Form
S-1 (Registration No. 333-34487). The number assigned to the Exhibit above is
the same as the number assigned to the Exhibit in the Registration Statement.

ITEM 9. UNDERTAKINGS.

     (a) The undersigned Registrant hereby undertakes:

          (1) To file, during any period in which offers or sales are being
made, a post-effective amendment to this registration statement to include any
material information with respect to the plan of distribution not previously
disclosed in the registration statement or any material change to such
information in the registration statement.

          (2) That, for the purpose of determining liability under the
Securities Act, each such post-effective amendment shall be deemed to be a new
registration statement relating to the securities offered therein, and the
offering of such securities at that time shall be deemed to be the initial bona
fide offering thereof.

          (3) To remove from registration by means of a post-effective amendment
any of the securities being registered which remain unsold at the termination of
the offering.

     (b) The undersigned Registrant hereby undertakes that, for purposes of
determining any liability under the Securities Act of 1933, each filing of the
Registrant's annual report pursuant to Section 13(a) or Section 15(d) of the
Securities Exchange Act of 1934 that is incorporated by reference in the
registration statement shall be deemed to be a new registration statement
relating to the securities offered therein, and the offering of such securities
at that time shall be deemed to be the initial bona fide offering thereof.

     (c) Insofar as indemnification for liabilities arising under the Securities
Act of 1933 may be permitted to directors, officers and controlling persons of
the Registrant pursuant to the foregoing provisions, or otherwise, the
Registrant has been advised that in the opinion of the Securities and Exchange
Commission such indemnification is against public policy as expressed in the Act
and is, therefore, unenforceable. In the event that a claim for indemnification
against such liabilities (other than the payment by the Registrant of expenses
incurred or paid by a director, officer or controlling person of the Registrant
in the successful defense of any action, suit or proceeding) is asserted by such
director, officer or controlling person in connection with the securities being
registered, the Registrant will, unless in the opinion of its counsel the matter
has been settled by controlling precedent, submit to a court of appropriate
jurisdiction the question whether such indemnification by it is against public
policy as expressed in the Act and will be governed by the final adjudication of
such issue.



                                      II-2
   5


                                   SIGNATURES


     Pursuant to the requirements of the Securities Act of 1933, the Registrant
certifies that it has reasonable grounds to believe that it meets all of the
requirements for filing on Form S-8 and has duly caused this registration
statement to be signed on its behalf by the undersigned, thereunto duly
authorized, in the Town of Chelmsford, Commonwealth of Massachusetts, on the
29 day of May, 2001.

                                        BROOKS AUTOMATION, INC.


                                        By: /s/ Robert J. Therrien
                                           -------------------------------------
                                           Robert J. Therrien
                                           Chief Executive Officer and President

                                POWER OF ATTORNEY

     KNOW ALL MEN BY THESE PRESENTS, that the person whose signature appears
below constitutes and appoints Robert J. Therrien and Ellen B. Richstone and
each of them (with full power to each of them to act alone), his true and lawful
attorneys-in-fact and agents, with full power of substitution and
resubstitution, for him and in his name, place and stead, in any and all
capacities, to sign any or all amendments (including post-effective amendments)
to this Registration Statement, and to file the same, with all exhibits thereto
and other documents in connection therewith, with the Securities and Exchange
Commission, granting unto said attorneys-in-fact and agents, and each of them,
full power and authority to do and perform each and every act and thing
requisite and necessary to be done in and about the premises, as fully to all
intents and purposes as he might or could do in person, hereby ratifying and
confirming all that said attorneys-in-fact and agents, or any of them, or their
substitutes, may lawfully do or cause to be done by virtue hereof.

     Pursuant to the requirements of the Securities Act of 1933, this
registration statement has been signed by the following persons in the
capacities and on the date indicated.




Signature                                        Title                            Date
---------                                        -----                            ----

                                                                            
/s/ Robert J. Therrien                           Director, Chief Executive        May 29, 2001
------------------------------------             Officer and President
Robert J. Therrien                               (Principal Executive Officer)

/s/ Ellen B. Richstone                           Senior Vice President Finance    May 29, 2001
------------------------------------             and Administration and Chief
Ellen B. Richstone                               Financial Officer (Principal
                                                 Financial Officer)

/s/ Steven E. Hebert                             Principal Accounting Officer     May 30, 2001
------------------------------------
Steven E. Hebert

/s/ Roger D. Emerick                             Director                         May 29, 2001
------------------------------------
Roger D. Emerick

/s/ Amin J. Khoury                               Director                         May 30, 2001
------------------------------------
Amin J. Khoury

/s/ Juergen Giessman                             Director                         May 30, 2001
------------------------------------
Juergen Giessmann



   6


                                INDEX TO EXHIBITS



EXHIBIT
NUMBER
-------
       
 4.2      Description of Capital Stock (contained in the Certificate of Incorporation,
          as amended, of the Registrant, filed as Exhibit 3.01 to the Registrant's
          Quarterly Report on Form 10-Q).*

 4.3      Rights Agreement, dated July 23, 1997.**

 5.1      Legal Opinion of Brown, Rudnick, Freed & Gesmer.

23.1      Consent of PricewaterhouseCoopers LLP.

23.2      Consent of Brown, Rudnick, Freed & Gesmer (included in its legal opinion
          filed as Exhibit 5.1 to this Registration Statement).

24        Power of Attorney (included on the signature page of this Registration
          Statement).

99.4      Registrant's 2001 Restricted Stock Purchase Plan for KLA Product Line
          Acquisition.


---------
* Incorporated by reference to the Registrant's Quarterly Report on Form 10-Q
for the quarterly period ended March 31, 2000. The number assigned to each
Exhibit above is the same as the number assigned to the Exhibit in the Quarterly
Report.

** Incorporated by reference to the Registrant's Registration Statement on Form
S-1 (Registration No. 333- 34487). The number assigned to the Exhibit above is
the same as the number assigned to the Exhibit in the Registration Statement.


                                      II-4