UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, DC 20549 SCHEDULE 13G/A UNDER THE SECURITIES EXCHANGE ACT OF 1934 (AMENDMENT NO. 5) ASML HOLDING N.V. -------------------------------------------------------------------------------- (Name of Issuer) COMMON STOCK, NOMINAL VALUE EURO 0.02 PER SHARE -------------------------------------------------------------------------------- (Title of Class of Securities) N07059111 -------------------------------------------------------------------------------- (CUSIP Number) JUNE 27, 2003 -------------------------------------------------------------------------------- (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Schedule is filed: [ ] Rule 13d-1(b) [ ] Rule 13d-1(c) [X] Rule 13d-1(d) CUSIP NO. N07059111 SCHEDULE 13G PAGE 2 OF 5 PAGES -------------------------------------------------------------------------------- 1 Names of Reporting Persons S.S. or I.R.S. Identification No. of Above Person Koninklijke Philips Electronics N.V. -------------------------------------------------------------------------------- 2 Check the Appropriate Box if a Member of a Group* (a) [ ] (b) [ ] -------------------------------------------------------------------------------- 3 SEC Use Only -------------------------------------------------------------------------------- 4 Citizenship or Place of Organization The Netherlands -------------------------------------------------------------------------------- Number of 5 Sole Voting Power Shares 18,000,000 ----------------------------------------------------- Beneficially 6 Shared Voting Power 0 Owned by ----------------------------------------------------- 7 Sole Dispositive Power Each 18,000,000 ----------------------------------------------------- Reporting 8 Shared Dispositive Power Person With 0 -------------------------------------------------------------------------------- 9 Aggregate Amount Beneficially Owned by Each Reporting Person 18,000,000 -------------------------------------------------------------------------------- 10 Check box if the Aggregate Amount in Row (9) Excludes Certain Shares*[ ] -------------------------------------------------------------------------------- 11 Percent of Class Represented by Amount in Row (9) 3.73%* -------------------------------------------------------------------------------- 12 Type of Reporting Person HC -------------------------------------------------------------------------------- --------- * Calculated based on the number of ordinary shares outstanding as reported by ASML Holding N.V. Item 1(a) Name of Issuer. ASML Holding N.V. Item 1(b) Address of Issuer's Principal Executive Offices. 1110 De Run, 5503 LA Veldhoven, The Netherlands Item 2(a) Name of Person Filing. Koninklijke Philips Electronics N.V. Item 2(b) Address of Principal Business Office or, if None, Residence. Breitner Center, Amstelplein 2, 1096 BC Amsterdam, The Netherlands Item 2(c) Citizenship. The Netherlands Item 2(d) Title of Class of Securities. Common Stock, nominal value Euro 0.02 per Share Item 2(e) CUSIP Number. N07059111 Item 3 If this Statement is Filed Pursuant to Rule 13d-1(b), or 13d-2(b) or (c), Check Whether the Person Filing is a: N/A Item 4 Ownership. (a) Amount beneficially owned: 18,000,000. (b) Percent of class: 3.73%. (c) Number of shares as to which such person has: (i) Sole power to vote or to direct the vote 18,000,000. (ii) Shared power to vote or to direct the vote 0. (iii) Sole power to dispose or to direct the disposition of 18,000,000. (iv) Shared power to dispose or to direct the disposition of 0. Page 3 of 5 Item 5 Ownership of Five Percent or Less of a Class. If this statement is being filed to report the fact that as of the date hereof the reporting person has ceased to be the beneficial owner of more than five percent of the class of securities, check the following. x Item 6 Ownership of More than Five Percent on Behalf of Another Person. N/A Item 7 Identification and Classification of the Subsidiary Which Acquired the Security Being Reported on by the Parent Holding Company or Control Person. N/A Item 8 Identification and Classification of Members of the Group. N/A Item 9 Notice of Dissolution of Group. N/A Item 10 Certification. N/A Page 4 of 5 SIGNATURE After reasonable inquiry and to the best of my knowledge and belief, I certify that the information set forth in this statement is true, complete and correct. Dated: July 10, 2003 KONINKLIJKE PHILIPS ELECTRONICS N.V., a Netherlands Corporation By: [/s/ J.H.M. Hommen] ----------------------------------- Name: J.H.M. Hommen Title: Executive Vice-President of Royal Philips Electronics, Chief Financial Officer and Vice-Chairman of the Board of Management and the Group Management Committee Page 5 of 5