UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  SCHEDULE 13D


                    Under the Securities Exchange Act of 1934


                          AUGUST TECHNOLOGY CORPORATION
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                                (Name of Issuer)

                                  Common Stock
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                         (Title of Class of Securities)

                                   051064 10 5
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                                 (CUSIP Number)

                                 Stanley Piekos
                              4900 West 78th Street
                          Bloomington, Minnesota 55435
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                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                January 21, 2005
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             (Date of Event which Requires Filing of this Statement)

If the filing person has previously  filed a statement on Schedule 13G to report
the  acquisition  that is the subject of this  Schedule  13D, and is filing this
schedule because of ss.ss.240.13d-1(e),  240.13d-1(f) or 240.13d-1(g), check the
following box.

Note:  Schedules  filed in paper format shall include a signed original and five
copies of the  schedule,  including  all exhibits.  See  ss.240.13d-7  for other
parties to whom copies are to be sent.

*The  remainder of this cover page shall be filled out for a reporting  person's
initial filing on this form with respect to the subject class of securities, and
for  any  subsequent   amendment   containing   information  which  would  alter
disclosures provided in a prior cover page.

The information required on the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the  Securities  Exchange  Act of
1934 ("Act") or otherwise  subject to the liabilities of that section of the Act
but  shall be  subject  to all other  provisions  of the Act  (however,  see the
Notes).





CUSIP No.   051064 10 5
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  1. Name of Reporting Persons:  Nanometrics Incorporated 
     I.R.S. Identification Nos. of above persons (entities only): No. 94-2276314
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  2. Check the Appropriate Box if a Member of a Group (See Instructions)(a) [ ]
     Not Applicable.                                                    (b) [ ]
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  3. SEC Use Only
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  4. Source of Funds (See Instructions): OO
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  5. Check if Disclosure of Legal Proceedings Is Required Pursuant to Items 2(d)
     or 2(e)                                                            [ ]
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  6. Citizenship or Place of Organization: 
     California
------------------ -------------------------------------------------------------
Number of Shares         7. Sole Voting Power:  0
Beneficially            --------------------------------------------------------
Owned by Each            8. Shared Voting Power: 1,738,441(1)
Reporting Person        --------------------------------------------------------
With                     9. Sole Dispositive Power: 0
                        --------------------------------------------------------
                        10. Shared Dispositive Power: 0
--------------------------------------------------------------------------------
11.  Aggregate Amount Beneficially Owned by Each Reporting Person: 1,738,441(2)
--------------------------------------------------------------------------------
12.  Check if the  Aggregate  Amount in Row (11)  Excludes  Certain  Shares  
     (See Instructions)                                                   [ ]
--------------------------------------------------------------------------------
13.  Percent of Class Represented by Amount in Row (11): 9.44%(3)
--------------------------------------------------------------------------------
14.  Type of Reporting Person (See Instructions):                     CO
--------------------------------------------------------------------------------

(1)  Beneficial  ownership  of the  common  stock  referred  to  herein is being
reported  hereunder  solely because  Nanometrics  Incorporated  (the  "Reporting
Person") may be deemed to have  beneficial  ownership of such shares as a result
of the voting  agreements and  irrevocable  proxies  described in Item 6 hereof.
Neither the filing of this  Statement  on Schedule  13D nor any of its  contents
shall be deemed to constitute an admission by Nanometrics  Incorporated  that it
is the  beneficial  owner of any of the  common  stock  referred  to herein  for
purposes of Section 13(d) of the Securities Exchange Act of 1934, as amended, or
for any other purpose,  and such beneficial  ownership is expressly  disclaimed.
1,170,911  outstanding shares of August Technology  Corporation common stock are
subject to voting  agreements  and  irrevocable  proxies  entered  into  between
Nanometrics   Incorporated  and  certain   stockholders  of  August   Technology
Corporation  (discussed in Items 3 and 4 below),  which number excludes  567,530
shares issuable upon exercise of outstanding  options which are either vested or
will vest within 60 days of January 21, 2005. In the event that any such options
were  exercised,  the shares of common stock  issuable upon the exercise of such
options would be subject to such voting agreements and irrevocable proxies also.

(2) See footnote 1 above.

(3) Based on the  number of shares of  Issuer  common  stock  outstanding  as of
January 20, 2005 (as represented by Issuer in the Merger Agreement  discussed in
Item 3 hereof),  the percent of common stock represented by the amount in Row 11
is  approximately  9.44%.  Such number includes  567,530 shares of Issuer common
stock subject to options that are currently  exercisable or  exercisable  within
sixty days of January 21, 2005.




Item 1.  Security and Issuer

         The class of equity  securities  to which this  Schedule 13D relates is
the common stock,  of August  Technology  Corporation,  a Minnesota  corporation
("Issuer").  Issuer's principal executive officers are located at 4900 West 78th
Street, Bloomington, Minnesota 55435.

Item 2.  Identity and Background

         This  Schedule  13D is  being  filed  by  Nanometrics  Incorporated,  a
California corporation  ("Reporting Person"). The principal executive offices of
Reporting Person are located at 1550 Buckeye Drive, Milpitas,  California 95035.
The principal business of Reporting Person is the design, manufacture, marketing
and support of thin film,  critical  dimension,  surface  defect  inspection and
overlay metrology systems for the semiconductor, flat panel display and magnetic
recording head industries.

         Set forth on Schedule A hereto is (i) the name of each of the executive
officers  and  directors  of Reporting  Person,  (ii) the  residence or business
address of each of the directors of Reporting  Person,  (iii) present  principal
occupation  or  employment  of each of the  executive  officers and directors of
Reporting  Person,  and  the  name,   principal  business  and  address  of  any
corporation or other organization in which such employment is conducted, in each
case as of the date hereof.  The business  address of the executive  officers of
Reporting  Person is the same as the  address of  Reporting  Person's  principal
executive office.

         Neither Reporting Person nor, to the knowledge of Reporting Person, any
person  named on  Schedule A hereto (i)  during  the last five  years,  has been
convicted in a criminal  proceeding  (excluding  traffic  violations  or similar
misdemeanors),  or (ii)  during  the  last  five  years,  was a party to a civil
proceeding of a judicial or administrative body of competent jurisdiction and as
a result of such  proceeding was or is subject to a judgment,  decree,  or final
order  enjoining  future  violations of, or prohibiting or mandating  activities
subject  to,  Federal or state  securities  laws or finding any  violation  with
respect to such laws.

         To the knowledge of Reporting Person, except as set forth on Schedule A
hereto,  each of the  individuals set forth on Schedule A hereto is a citizen of
the United States.

Item 3.      Source and Amount of Funds or Other Consideration

         On January 21, 2005,  Reporting Person, Major League Merger Corporation
("Merger Sub 1"), a wholly-owned  subsidiary of Reporting Person and a Minnesota
corporation,  Minor League Merger  Corporation  ("Merger Sub 2"), a wholly-owned
subsidiary of Reporting Person and a Delaware corporation,  and Issuer,  entered
into  an  Agreement  and  Plan  of  Merger  and   Reorganization   (the  "Merger
Agreement").  Pursuant to the terms and subject to the  conditions  set forth in
the Merger  Agreement,  Reporting  Person  will merge with and into Merger Sub 2
(the  "Migratory  Merger"),  with  Merger  Sub 2  continuing  as  the  surviving
corporation  (following the Migratory Merger, Merger Sub 2 is referred to herein
as "Nanometrics  Delaware").  Following the Migratory Merger,  Merger Sub 1 will
merge with and into Issuer (the  "Acquisition  Merger",  and  together  with the
Migratory  Merger,  the  "Mergers"),  with Issuer  continuing  as the  surviving
corporation and becoming a wholly owned subsidiary of Nanometrics  Delaware.  At
that time, Nanometrics Delaware will be renamed August Nanometrics Inc.

         In connection with the Migratory Merger, each share of Reporting Person
common stock that is outstanding  at the effective time of the Migratory  Merger
(the  "Migratory  Merger  Effective  Time") will be converted  into one share of
common  stock of  Nanometrics  Delaware.  Each  outstanding  option to  purchase
Reporting Person common stock will be converted at the into an option to acquire
Nanometrics  Delaware common stock and will continue to have, and be subject to,
the  same  terms  and  conditions  as are in  effect  immediately  prior  to the
Migratory Merger Effective Time.



         In connection with the Acquisition  Merger, each share of Issuer common
stock that is outstanding at the effective time of the  Acquisition  Merger (the
"Acquisition Merger Effective Time") will be converted into the right to receive
0.6401 shares of common stock of Nanometrics  Delaware.  Each outstanding option
to purchase  Issuer  common stock will be converted  at the  Acquisition  Merger
Effective Time into an option to acquire  Nanometrics  Delaware common stock and
shall  continue to have, and be subject to, the same terms and conditions as are
in  effect  immediately  prior to the  Acquisition  Merger  Effective  Time.  No
fractional  shares of  Nanometrics  Delaware's  common stock will be issued as a
result of the share exchange pursuant to the Acquisition Merger.

         Concurrently  with  the  execution  of  the  Merger  Agreement,  and in
consideration  thereof  certain  shareholders  of Issuer entered into individual
agreements with Reporting  Person whereby each such  shareholder  agreed to vote
all of the  shares  of the  common  stock of Issuer  beneficially  owned by such
shareholder  in favor  of the  Acquisition  Merger  and the  other  transactions
contemplated by the Merger Agreement (the "Voting  Agreements"),  and to grant a
proxy to certain  representatives of Reporting Person to enable Reporting Person
to direct  the  voting of all such  shares in the  foregoing  manner.  Reporting
Person did not pay additional consideration to any of the foregoing shareholders
to induce such  shareholders to enter into such voting  agreements or grant such
proxies.

         Pursuant to the Voting Agreements, such Issuer shareholders have agreed
to vote (or cause to be voted) their shares of Issuer  common stock (i) in favor
of the  approval  of the  Merger  Agreement  and (ii)  against  approval  of any
proposal  made in  opposition  to the  transactions  contemplated  by the Merger
Agreement,  (iii)  against any actions  (other  than those  contemplated  by the
Merger  Agreement)  for the  merger,  consolidation,  sale or lease  of  assets,
reorganization, liquidation, change in the capitalization or corporate structure
of Issuer or any other action that would interfere with the actions contemplated
by the Merger  Agreement;  and (iv) in favor of waiving any notice that may have
been or may be required relating to any  reorganization  of Issuer.  Such Issuer
shareholders cannot sell, transfer or otherwise dispose of the shares subject to
the  Voting  Agreement  unless  the  transferee  becomes  a party to the  Voting
Agreement.  In addition,  such  shareholders  cannot  transfer the shares into a
voting  trust or enter into an  arrangement  whereby the voting  rights would be
transferred.

         The Voting  Agreements  terminates  on the earlier of (i) such date and
time as the Merger  Agreement  shall have been validly  terminated in accordance
with its terms and  conditions,  or (ii) such date and time as the Merger  shall
become effective in accordance with its terms and conditions.

         References  to,  and  descriptions  of,  the  Merger   Agreement,   the
Acquisition  Merger and the Voting  Agreements set forth herein are qualified in
their entirety by reference to the copies of the Merger Agreement and the Voting
Agreements  included as Exhibits 1 and 2,  respectively,  to this  Schedule 13D,
each of which is  incorporated  herein by reference  in its entirety  where such
references appear.

Item 4:  Purpose of Transaction

         (a) - (b) As  described in Item 3 above,  this  Schedule 13D relates to
the merger of Issuer and Reporting Person pursuant to the Merger Agreement.  The
purpose of the Voting  Agreements  is to enable  Reporting  Person and Issuer to
consummate the transactions contemplated by the Merger Agreement.

         (c) Not applicable.

         (d) Upon the  consummation  of the  Acquisition  Merger,  the  board of
directors  of  August  Nanometrics  Inc.  will be  expanded  to  seven  members,
consisting of three Issuer  directors,  three Reporting Person directors and one
mutually acceptable  director.  Upon consummation of the Acquisition Merger, the
initial officers of the surviving corporation will be the officers of Merger Sub
1 immediately  prior to the effective  time of the Merger,  until his respective
successor is duly appointed. Reporting Person will appoint each of the directors
and officers of Merger Sub 1.

         (e) Other than as a result of the Mergers  described in Item 3 and Item
4 above, not applicable.

         (f) Not applicable.



         (g) Upon  consummation  of the  Acquisition  Merger,  the  articles  of
incorporation  of Merger  Sub 1 will be the  articles  of  incorporation  of the
surviving  corporation of the Acquisition  Merger,  until thereafter  amended in
accordance with applicable law. Upon consummation of the Acquisition Merger, the
Bylaws of Merger Sub 1, will be the Bylaws of the surviving  corporation  of the
Acquisition Merger until thereafter amended in accordance with applicable law.

         (h-i) Upon  consummation of the Acquisition  Merger,  all Issuer common
stock  will be  deregistered  under  the  Securities  Exchange  Act of 1934,  as
amended, and delisted from the Nasdaq National Market.

         (j) Other than described above,  Reporting Person currently has no plan
or  proposals  which  relate to, or may result in, any of the matters  listed in
Items 4(a) - (j) of Schedule 13D, inclusive,  although Reporting Person reserves
the right to develop such plans.

Item 5.  Interest in Securities of Issuer

         (a)-(b) As a result of the Voting  Agreements,  the aggregate number of
shares  of  Issuer  common  stock  that  Reporting   Person  may  be  deemed  to
beneficially own is 1,738,441.  Such number constitutes  approximately  9.44% of
the  outstanding  Issuer common stock based on the  17,841,620  shares of Issuer
common stock outstanding as of January 20, 2005 (as represented by Issuer in the
Merger Agreement discussed in Item 3 above) and assuming the issuance of 567,530
shares of Issuer common stock subject to options that are currently  exercisable
or exercisable within sixty days of January 21, 2005.  Reporting Person also may
be deemed to have shared  voting power with respect to the  foregoing  shares of
Issuer  common stock with respect to those  matters  described  above.  However,
Reporting Person (a) is not entitled to any rights as a stockholder of Issuer as
to the foregoing shares of Issuer common stock, and (b) disclaims any beneficial
ownership  of the shares of Issuer  common stock which are covered by the Voting
Agreements.

         Set forth on  Schedule  B hereto is the name of those  stockholders  of
Issuer that have entered into a Voting Agreement with Reporting  Person,  and to
the knowledge of Reporting  Person,  each of their respective  present principal
occupation or employment,  including the name, principal business and address of
any corporation or other organization in which such employment is conducted.

         (c) To the knowledge of Reporting  Person, no transactions in the class
of securities  reported on this Statement have been effected  during the past 60
days by the persons named in response to Item 5(a) and Item 2.

         (d) To the knowledge of Reporting Person, no other person has the right
to receive or the power to direct the receipt of dividends from, or the proceeds
from the sale of, the class of securities reported on this Schedule 13D.

         (e) Not applicable.

Item 6.  Contracts, Arrangements, Understandings or Relationships with Respect 
         to Securities of Issuer

         Other than the Merger Agreement and the exhibits thereto, including the
Voting Agreements, to the knowledge of Reporting Person, there are no contracts,
arrangements,  understandings  or  relationships  (legal or otherwise) among the
persons  named in Item 2 of Schedule 13D and between such persons and any person
with respect to any securities of Issuer, including, but not limited to transfer
or voting of any of the class of securities reported on this Statement, finder's
fees, joint ventures, loan or option arrangements,  puts or calls, guarantees of
profits, division of profits or loss, or the giving or withholding of proxies.


Item 7.  Material to Be Filed as Exhibits

     1.       Agreement  and Plan of  Merger  and  Reorganization  by and  among
              Nanometrics  Incorporated,  Major  League  Merger  Corporation,  a
              wholly-owned  subsidiary  of the  Nanometrics  Incorporated  and a
              Minnesota   corporation,   Minor  League  Merger  Corporation,   a
              wholly-owned  subsidiary  of the  Nanometrics  Incorporated  and a
              Delaware corporation,  and August Technology Corporation.  

     2.       Form of Voting Agreement.



                                    Signature

After  reasonable  inquiry and to the best of my knowledge and belief, I certify
that the information set forth in this statement is true, complete and correct.



January 28, 2005
--------------------------------------------------------------------------------
Date

/s/ Paul Nolan
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Signature

Paul Nolan, Chief Financial Officer  of  Nanometrics Incorporated
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Name/Title





                                   SCHEDULE A

          DIRECTORS AND EXECUTIVE OFFICERS OF NANOMETRICS INCORPORATED

         The following table sets forth the name,  business  address and present
principal  occupation or employment  of each  executive  officer and director of
Reporting Person.
--------------------------------------------------------------------------------
Directors and           Title of Present                Business Address
Executive Officers      Principal Occupation
--------------------------------------------------------------------------------
Vincent J. Coates       Chairman of the Board,         Nanometrics Incorporated
                        Secretary                      1550 Buckeye Dr.
                                                       Milpitas, California 
                                                       95035
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John D. Heaton          President, Chief               Nanometrics Incorporated
                        Executive Officer              1550 Buckeye Drive    
                        and Director                   Milpitas, California 
                                                       95035                   
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Paul B. Nolan           Vice President and             Nanometrics Incorporated
                        Chief Financial Officer        1550 Buckeye Drive
                                                       Milpitas, California 
                                                       95035
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Roger Ingalls Jr.       Vice President of Sales        Nanometrics Incorporated
                                                       1550 Buckeye Drive
                                                       Milpitas, California 
                                                       95035
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Edmond R. Ward          Director; Chief Technical      Unity Semiconductor
                        Officer, Unity                 250 North Wolfe Road
                        Semiconductor  and General     Sunnyvale, California 
                        Partner, Virtual Founders      94085
 -------------------------------------------------------------------------------
William G. Oldham       Director; faculty member,      University of California,
                        University of                  Berkeley                
                        California, Berkeley           Berkeley, CA 94720      
--------------------------------------------------------------------------------
Stephen J. Smith        Director; professor,           Stanford University 
                        Stanford  University           School of Medicine 
                        School of Medicine             Department of Molecular
                                                       and Cellular Physiology
                                                       300 Pasteur Drive
                                                       Stanford, CA 94305
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J. Thomas Bentley       Director                       Nanometrics Incorporated
                                                       1550 Buckeye Drive
                                                       Milpitas, California 
                                                       95035
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Norman Coates           Director                       Nanometrics Incorporated
                                                       1550 Buckeye Drive
                                                       Milpitas, California 
                                                       95035
--------------------------------------------------------------------------------



                                   SCHEDULE B

     STOCKHOLDERS PARTY TO A VOTING AGREEMENT WITH NANOMETRICS INCORPORATED

         The following table sets forth the name,  business  address and present
principal  occupation  or  employment  of each  stockholder  party  to a  Voting
Agreement with  Nanometrics  Incorporated  and the aggregate number of shares of
August  Technology  Corporation  Common  Stock  beneficially  owned by each such
stockholder as of January 21, 2005.




                                                                                      
Stockholder Party                       Title and Present       Shares Beneficially            Business 
to Voting Agreement                     Principal               Owned                          Address
                                        Occupation                     
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Jeffrey L. O'Dell                       Chief Executive              1,103,936 (1)             August Technology Corporation
                                        Officer and Director                                   4900 West 78th Street,
                                                                                               Bloomington, Minnesota 55435
-----------------------------------------------------------------------------------------------------------------------------------
Stanley D. Piekos                       Chief Financial                 52,532 (2)             August Technology Corporation
                                        Officer                                                4900 West 78th Street,
                                                                                               Bloomington, Minnesota 55435
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David A. Klenk                          President and Chief            134,841 (3)             August Technology Corporation
                                        Operating Officer                                      4900 West 78th Street,
                                                                                               Bloomington, Minnesota 55435 
--------------------------------------------------- ---------------------- -------------------------- -----------------------------
Scott A. Gabbard                        Chief Accounting                68,565 (4)             August Technology Corporation
                                        Officer and Vice                                       4900 West 78th Street,
                                        President, Finance                                     Bloomington, Minnesota 55435
                                                                                                      
-----------------------------------------------------------------------------------------------------------------------------------
D. Mayson Brooks                        Vice President,                 98,593 (5)             August Technology Corporation
                                        Global Sales and                                       4900 West 78th Street, 
                                        Field Operations                                       Bloomington, Minnesota 55435
-----------------------------------------------------------------------------------------------------------------------------------
Cory M. Watkins                         Chief Technical Officer         35,002 (6)             August Technology Corporation
                                                                                               4900 West 78th Street,
                                                                                               Bloomington, Minnesota 55435
-----------------------------------------------------------------------------------------------------------------------------------
James A. Bernards                       Director; President,           117,796 (7)             Facilitation, Inc.
                                        Facilitation, Inc.                                     7200 Metro Boulevard,
                                                                                               Edina, MN 55419
-----------------------------------------------------------------------------------------------------------------------------------





                                                                                      
-----------------------------------------------------------------------------------------------------------------------------------
Roger E. Gower                          Director; President,            43,796 (8)             Micro Component
                                        Chief Executive                                        Technology, Inc.,
                                        Officer and Chairman                                   2340 W. County Road C,
                                        of Micro Component                                     St. Paul, MN 55113
                                        Technology, Inc.
-----------------------------------------------------------------------------------------------------------------------------------
Michael W. Wright                       Director; Chief                 51,026 (9)             Entegris, Inc.
                                        Operating Officer                                      3500 Lyman Blvd.
                                        Officer of Entegris, Inc.                              Chaska, MN 55318
------------------------------------------------------------------------------------------------------------------------------------
Linda Hall Whitman                      Director; Chief Executive       32,354 (10)            MinuteClinic, Inc.
                                        Officer of MinuteClinic Inc.                           333 Washington Ave.
                                                                                               N., Suite 5000
                                                                                               Minneapolis, MN 55401
------------------------------------------------------------------------------------------------------------------------------------



         (1)  Includes   1,090,686   outstanding  shares  of  August  Technology
Corporation  Common Stock,  and 13,250 shares of August  Technology  Corporation
Common Stock issuable upon the exercise of options to purchase August Technology
Corporation  Common  Stock which are  exercisable  within 60 days of January 21,
2005.

         (2)  Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 52,532 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (3) Includes 2,250 outstanding shares of August Technology  Corporation
Common Stock, and 132,591 shares of August Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (4)  Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 68,565 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (5) Includes 2,887 outstanding shares of August Technology  Corporation
Common Stock, and 95,706 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (6)  Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 35,002 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (7) Includes 75,088 outstanding shares of August Technology Corporation
Common Stock, and 42,708 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (8)  Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 43,796 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (9)  Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 51,026 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.

         (10) Includes 0  outstanding  shares of August  Technology  Corporation
Common Stock, and 32,354 shares of August  Technology  Corporation  Common Stock
issuable upon the exercise of options to purchase August Technology  Corporation
Common Stock which are exercisable within 60 days of January 21, 2005.