Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Rucci Corey
 2. Date of Event Requiring Statement (Month/Day/Year)
05/07/2014		 3. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG]
(Last)
(First)
(Middle)
700 DOVER PLACE		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
V.P. Business Development
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

SOUTHLAKE, TX 76092		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 21,120.571 (1) (2)
D
 
Common Stock 50,000
I
By IRA

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Employee Stock Option (Right to Buy)   (3) 02/19/2018 Common Stock 9,320 $ 8.76 D  
Employee Stock Option (Right to Buy)   (4) 02/19/2019 Common Stock 11,070 $ 9.27 D  
Employee Stock Option (Right to Buy)   (5) 02/19/2020 Common Stock 15,800 $ 9.88 D  
Employee Stock Option (Right to Buy)   (6) 02/19/2021 Common Stock 19,492 $ 11.71 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Rucci Corey
700 DOVER PLACE
SOUTHLAKE, TX 76092		       V.P. Business Development  

Signatures

/s/ Peter W. Walcott, Attorney-In-Fact for Corey Rucci 05/16/2014
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) These shares include a total of 10,565 restricted stock units granted on February 22, 2011, February 15, 2012, February 12, 2013 and February 11, 2014 with restrictions that lapse as follows: (i) 4,119 shares vest on February 19, 2015, (ii) 3,205 shares vest February 19, 2016, (iii) 2,126 shares vest on February 19, 2017, and (iv) 1,115 shares vest on February 19, 2018.
(2) These shares include 3,906.571 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan.
(3) This option vests in four equal annual installments. The first three installments became exercisable on February 19, 2012, February 19, 2013 and February 19, 2014, respectively. The final installment is exercisable on February 19, 2015.
(4) This option vests in four equal annual installments. The first two installments became exercisable on February 19, 2013 and February 19, 2014, respectively. The final two installments become exercisable on February 19, 2015 and February 19, 2016, respectively.
(5) This option vests in four equal annual installments. The first installment became exercisable on February 19, 2014 and the next three installments become exercisable on February 19, 2015, February 19, 2016 and February 19, 2017, respectively.
(6) This option vests in four equal annual installments. The first installment becomes exercisable on February 19, 2015, the next three installments become exercisable on February 19, 2016, February 19, 2017 and February 19, 2018, respectively.

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