UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                 SCHEDULE 13G/A


                    Under the Securities Exchange Act of 1934

                               (Amendment No. 2)*


                                 Entegris, Inc.
                ------------------------------------------------
                                (Name of Issuer)


                                  Common Stock
                ------------------------------------------------
                         (Title of Class of Securities)


                                    29362U104
                ------------------------------------------------
                                 (CUSIP Number)

*The remainder of this cover page shall be filled out for a reporting person's
initial filing on this form with respect to the subject class of securities, and
for any subsequent amendment containing information which would alter the
disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not be deemed
to be "filed" for the purpose of Section 18 of the Securities Exchange Act of
1934 ("Act") or otherwise subject to the liabilities of that section of the Act
but shall be subject to all other provisions of the Act (however, see the
Notes).

                                   Page 1 of 5



--------------------------                            --------------------------
CUSIP No. 29362U104                  13G/A                 Page 2 of 5 Pages
--------------------------                            --------------------------

---------- ---------------------------------------------------------------------
  1        NAME OF REPORTING PERSON
           S.S. or I.R.S. IDENTIFICATION NO. OF ABOVE PERSON

           James E. Dauwalter
---------- ---------------------------------------------------------------------
  2        CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*  Not Applicable.
                            (a)
                            (b)
---------- ---------------------------------------------------------------------
  3        SEC USE ONLY


---------- ---------------------------------------------------------------------
  4        CITIZENSHIP OR PLACE OF ORGANIZATION

           U.S.A.
---------- ---------------------------------------------------------------------
                     5    SOLE VOTING POWER

                          941,467
 NUMBER OF        ------- ------------------------------------------------------
  SHARES             6    SHARED VOTING POWER
BENEFICIALLY
 OWNED BY                 3,835,848
   EACH           ------- ------------------------------------------------------
REPORTING            7    SOLE DISPOSITIVE POWER
  PERSON
   WITH                   941,467
                  ------- ------------------------------------------------------
                     8    SHARED DISPOSITIVE POWER

                          3,835,848
---------- ---------------------------------------------------------------------
  9        AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

           4,777,315
---------- ---------------------------------------------------------------------
 10        CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES*


---------- ---------------------------------------------------------------------
 11        PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9

           6.7%
---------- ---------------------------------------------------------------------
 12        TYPE OF REPORTING PERSON*

           IN
---------- ---------------------------------------------------------------------
                      * SEE INSTRUCTION BEFORE FILLING OUT!

                                   Page 2 of 5



Item 1.

         (a)      Name of Issuer:

                  Entegris, Inc.

         (b)      Address of Issuer's Principal Executive Office:

                  3500 Lyman Boulevard
                  Chaska, MN 55318

Item 2.

         (a)      Name of Person Filing:

                  James E. Dauwalter

         (b)      Address of Principal Business Office:

                  3500 Lyman Boulevard
                  Chaska, MN 55318

         (c)      Citizenship:

                  U.S.A.

         (d)      Title of Class of Securities:

                  Common Stock, $.01 par value

         (e)      CUSIP Number:

                  29362U104

Item 3.  Not Applicable.

Item 4.  Ownership

         (a)      Amount beneficially owned:

                  4,777,315 shares. The number of shares beneficially owned as
         of December 31, 2002 includes 315,337 shares held directly; 640,333
         shares held by family members; 50,354 shares held by family foundation;
         2,250,000 shares held by Carville Company, L.P. and 600,000 shares held
         by Carville Company II, L.P. grantor retained annuity trusts which were
         formed by Reporting Person as part of a series of transactions for
         estate planning purposes; 15,000 shares


                                   Page 3 of 5



         held by a security charitable remainder trust; 280,161 shares allocated
         to Mr. Dauwalter's account under the Entegris, Inc. ESOP, and an
         aggregate of 626,130 shares subject to stock options exercisable within
         60 days.

         (b)      Percent of Class:

                  6.7%

         (c)      Number of Shares as to Which Such Person Has:

                  (i)      sole power to vote or direct the vote:

                           941,467

                  (ii)     shared power to vote or direct the vote:

                           3,835,848

                  (iii)    sole power to dispose or direct the disposition of:

                           941,467

                  (iv)     shared power to dispose or to direct the disposition
                           of:

                           3,835,848

Item 5.  Not Applicable.

Item 6.  Not Applicable.

Item 7.  Not Applicable.

Item 8.  Not Applicable.

Item 9.  Not Applicable.

Item 10. Not Applicable.


                                   Page 4 of 5



                                    SIGNATURE

         After reasonable inquiry and to the best of my knowledge and belief, I
certify that the information set forth in this statement is true, complete and
correct.

Dated:  February 13, 2003




                                       By: /s/ James E. Dauwalter
                                           -------------------------------
                                           James E. Dauwalter



                                   Page 5 of 5