UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  SCHEDULE 13D
                        Under the Securities Act of 1934

                    ELECTRO SCIENTIFIC INDUSTRIES INC. (ESIO)
                                (Name of Issuer)

                                  Common Stock
                         (Title of Class of Securities)

                                    285229100
                                 (CUSIP Number)

                                David Nierenberg

                               The D3 Family Funds

                               19605 NE 8th Street

                                 Camas, WA 98607

                                  360-604-8600

                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                 March 09, 2006
             (Date of Event which Requires Filing of this Statement)

If the filing person has previously  filed a statement on Schedule 13G to report
the  acquisition  that is the  subject of this  Schedule  13D and is filing this
schedule because of ss.ss.240.13d-1(e),  240.13d-1(f) or 240.13d-1(g), check the
following box: |_|



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Fund, L.P. (David Nierenberg is president of the General
     Partner, which is Nierenberg Investment Management Company.)
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|

--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    895,609 common shares (3.1%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           895,609
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     1,975,012 shares (6.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     6.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

    The D3 Family Retirement Fund, L.P. (David Nierenberg is president of the
    General Partner, which is Nierenberg Investment Management Company.)
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|

--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    297,025 common shares (1.0%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           297,025
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     1,975,012 shares (6.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     6.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       3


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Children's Fund, L.P. (David Nierenberg is president of the General
     Partner, which is Nierenberg Investment Management Company.)
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|

--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    79,239 common shares (0.3%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           79,239
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     1,975,012 shares (6.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     6.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       4


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Offshore Fund, L.P. (David Nierenberg is president of the General
     Partner, which is Nierenberg Investment Management Company.)
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|

--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    440,855 common shares (1.5%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           440,855
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     1,975,012 shares (6.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     6.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       5


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Bulldog Fund, L.P. ((David Nierenberg is president of the
     General Partner, which is Nierenberg Investment Management Company.)
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|

--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    262,284 common shares (0.9%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           262,284
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     1,975,012 shares (6.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     6.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       6


Item 1. Security and Issuer.

        Common stock in ELECTRO  SCIENTIFIC  INDUSTRIES  INC.  (ESIO),  13900 NW
        Science Park Drive, Portland, OR 97229

Item 2. Identity and Background.

        The D3 Family Funds are  Washington  State limited  partnerships,  whose
        principal  business is  investing  in the  equities of public  micro-cap
        issuers.  The D3 Family Funds consist of: D3 Family Fund, L.P, D3 Family
        Retirement  Fund, L.P, D3 Children's  Fund, L.P, D3 Offshore Fund, L.P.,
        D3 Family  Bulldog  Fund,  L.P.  Located at 19605 N.E.  8th St.,  Camas,
        Washington  98607.  No  convictions  or  administrative  proceedings  as
        described in 2 (d) and (e).

Item 3. Source and Amount of Funds or Other Consideration

        Source of funds is money invested in the partnership by their partners.

Item 4. Purpose of Transaction

        We added meaningfully to our ESIO investment on March 23, when the stock
        sold off sharply.  We believe that our recent  purchases  make us ESIO's
        third largest  shareholder.  We have been  shareholders much of the past
        decade.

        ESIO has long enjoyed  several  attractive  investment  attributes.  The
        company has a fortress balance sheet,  with over $8.00 per share in cash
        (including the litigation  escrow).  With continuing  profitability  and
        normal  collection of  receivables,  we anticipate  that ESIO's cash per
        share could rise to $9.00 by the end of calendar  2006 and $10.00 by the
        end of 2007.  ESIO holds the leading  market  share in each of its three
        largest businesses.  Most notably, ESIO has a 70-75% share of the memory
        yield improvement (MYI) business, which generated 63% of its revenues in
        the first nine months of fiscal 2006.

        Several recent  developments make ESIO even more attractive.  First, CEO
        Nick  Konidaris,  who joined ESIO just two years ago, is an accomplished
        veteran of the semiconductor  capital  equipment  industry who drove his
        previous  company  to  leadership  in  its  product  category.  At  ESIO
        Konidaris has been  strengthening  his management team,  reducing costs,
        breaking down silos, and increasing  investment in customer-driven  R&D.
        Second,  the cost reductions  enable ESIO to earn at least a 20% pre-tax
        return on sales in strong  times,  while  generating  positive cash flow
        during  downturns.  Third,  several  factors  should  accelerate  ESIO's
        organic  revenue  growth rate to 3-5 times U.S.  GDP growth:  increasing
        DRAM bit rate growth and chip density should  accelerate MYI sales,  and
        higher R&D investment is spawning new  ultra-violet  and infra-red laser
        MYI products,  machine  vision  products,  capacitor test and inspection
        products, and other applications of ESIO's core laser technologies.


                                       7


        We have one  request  for ESIO's  Board:  we believe  that ESIO needs to
        dramatically boost its return on equity. While ESIO's return on sales is
        becoming  acceptable,  the  company's  cash hoard  constrains  return on
        equity to  mediocre  single  digits.  We  recognize  that cash  protects
        shareholder   value  during  deep  downturns  and  could  fund  possible
        acquisitions.  But it is not  advantageous  to have  too  much of a good
        thing, not if the cash sits unused when it could work smarter or do more
        somewhere else. ESIO has no debt. Cash will grow, even during downturns.
        Breakeven has been lowered. The company has not made an acquisition in a
        long time. The many promising products emerging from ESIO's laboratories
        should, by themselves, accelerate revenue growth.

        Therefore,  unless an acquisition by ESIO is imminent, we urge the board
        to  give  serious  consideration  to  paying  out a large  special  cash
        dividend,  funded by cash on hand and  perhaps by cash  borrowed  from a
        leveraged  recapitalization of the company. We believe that this program
        could raise  return on equity to an  acceptable  level,  accelerate  EPS
        growth  without undue  financial  risk,  and preserve  ESIO's  continued
        independence.

        This  is  no  wild,  heretical  notion.  As  the  semiconductor  capital
        equipment industry has matured,  its best managed companies have learned
        to generate cash throughout the cycle and have built mountains of excess
        cash.  Therefore such leading firms as Applied  Materials and KLA-Tencor
        have begun  returning large sums of cash to their  shareholders  through
        dividend and share repurchase programs.  This is part of a broader trend
        among  tech  companies.  For  example,  Microsoft  paid out an  enormous
        special  dividend  to its  shareholders  in  late  2004.  We hope to see
        similar  shareholder  friendly  financial  practices  take root at ESIO,
        while the company continues  investing in its future growth.  Failure to
        make the  company's  balance  sheet work  smarter  could risk  continued
        mediocre  returns on  shareholders'  capital,  which in turn could cause
        ESIO's  share  price to  languish,  or could  jeopardize  the  company's
        independence.  We  encourage  ESIO to move  proactively  to control  its
        destiny and maximize shareholder returns.

Item 5. Interest in Securities of the Issuer.

        (a,b) D3 Family  Funds own and have sole  voting and  dispositive  power
        over 1,975,012, 6.8% common shares of ESIO.


                                       8


        (c)

   Fund                              Transaction Date     Shares Bought    Price
   D3 Family Fund, L.P.                      3/6/2006            10,000    25.18
   D3 Family Fund, L.P.                      3/7/2006            18,000    25.03
   D3 Family Fund, L.P.                      3/8/2006            12,000    24.59
   D3 Family Fund, L.P.                      3/9/2006            18,000    24.17
   D3 Family Fund, L.P.                     3/10/2006            25,000    24.02
   D3 Family Fund, L.P.                     3/13/2006            19,500    23.82
   D3 Family Fund, L.P.                     3/23/2006           135,000    22.20
   D3 Family Fund, L.P.                     3/23/2006            27,500    21.83
   D3 Family Fund, L.P.                     3/24/2006             7,000    21.91
   D3 Family Retirement Fund, L.P.           3/6/2006            12,000    25.18
   D3 Family Retirement Fund, L.P.           3/7/2006            10,000    25.03
   D3 Family Retirement Fund, L.P.           3/8/2006            10,000    24.59
   D3 Family Retirement Fund, L.P.           3/9/2006             7,000    24.17
   D3 Family Retirement Fund, L.P.          3/10/2006             3,000    24.02
   D3 Family Retirement Fund, L.P.          3/13/2006             6,500    23.82
   D3 Family Retirement Fund, L.P.          3/23/2006            45,000    22.20
   D3 Family Retirement Fund, L.P.          3/23/2006             8,600    21.83
   D3 Family Retirement Fund, L.P.          3/24/2006             2,400    21.91
   D3 Children's Fund, L.P.                  3/6/2006             6,659    25.18
   D3 Children's Fund, L.P.                  3/7/2006             2,000    25.03
   D3 Children's Fund, L.P.                  3/8/2006             3,000    24.59
   D3 Children's Fund, L.P.                  3/9/2006             2,000    24.17
   D3 Children's Fund, L.P.                 3/10/2006               500    24.02
   D3 Children's Fund, L.P.                 3/13/2006             1,515    23.82
   D3 Children's Fund, L.P.                 3/23/2006            12,000    22.20
   D3 Children's Fund, L.P.                 3/23/2006             2,500    21.83
   D3 Children's Fund, L.P.                 3/24/2006               500    21.91
   D3 Offshore Fund, L.P.                    3/8/2006            10,000    24.59
   D3 Offshore Fund, L.P.                    3/9/2006            10,909    24.17
   D3 Offshore Fund, L.P.                   3/10/2006             7,757    24.02
   D3 Offshore Fund, L.P.                   3/13/2006             9,500    23.82
   D3 Offshore Fund, L.P.                   3/23/2006            67,000    22.20
   D3 Offshore Fund, L.P.                   3/23/2006            12,550    21.83
   D3 Offshore Fund, L.P.                   3/24/2006             3,650    21.91
   D3 Family Bulldog Fund, L.P.             1/27/2006             8,193    24.39
   D3 Family Bulldog Fund, L.P.             1/30/2006               300    24.40
   D3 Family Bulldog Fund, L.P.             2/22/2006             1,791    25.00
   D3 Family Bulldog Fund, L.P.             2/23/2006            23,309    25.00
   D3 Family Bulldog Fund, L.P.             2/24/2006             3,300    24.99
   D3 Family Bulldog Fund, L.P.             2/28/2006            17,941    24.97
   D3 Family Bulldog Fund, L.P.             3/10/2006             2,500    24.02
   D3 Family Bulldog Fund, L.P.             3/13/2006             5,500    23.82
   D3 Family Bulldog Fund, L.P.             3/23/2006            41,000    22.20
   D3 Family Bulldog Fund, L.P.             3/23/2006             8,400    21.83
   D3 Family Bulldog Fund, L.P.             3/24/2006             1,900    21.91


                                       9


        (d) N/A

        (e) N/A

Item 6. Contracts, Arrangements, Understandings or Relationships with Respect to
        Securities of the Issuer.

        N/A

Item 7. Material to be Filed as Exhibits

        N/A

                                    SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, each of the
undersigned certifies that the information set forth in the Statement is true,
complete and correct.

March 28, 2006                            /s/ DAVID NIERENBERG
                                          --------------------------------------
                                          David Nierenberg
                                          President
                                          Nierenberg Investment Management
                                          Company, Inc., the General Partner of
                                          The D3 Family Funds


                                       10