UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  SCHEDULE 13D
                    Under the Securities Exchange Act of 1934
                                (Amendment No. 6)

                    ELECTRO SCIENTIFIC INDUSTRIES INC. (ESIO)
                                (Name of Issuer)

                                  Common Stock
                         (Title of Class of Securities)

                                    285229100
                                 (CUSIP Number)

                                David Nierenberg
                               The D3 Family Funds
                               19605 NE 8th Street
                                 Camas, WA 98607
                                 (360) 604-8600

                                 With a copy to:

                               Henry Lesser, Esq.
                                DLA Piper US LLP
                             2000 University Avenue
                            East Palo Alto, CA 94303
                                 (650) 833-2000

                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                January 22, 2007
             (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to report
the acquisition that is the subject of this Schedule 13D and is filing this
schedule because of ss.ss. 240.13d-1(e), 240.13d-1(f) or 240.13d-1(g), check the
following box |_|.



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    585,202 Common shares (2.0%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           585,202
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 585,202; for all
     reporting persons as a group, 3,374,484 shares (11.6%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.6%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       2


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The DIII Offshore Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    774,214 common shares (2.7%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           774,214
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 774,214; for all
     reporting persons as a group, 3,374,484 shares (11.6%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.6%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       3


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Bulldog Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    2,015,068 common shares (6.9%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           2,015,068
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 2,015,068; for all
     reporting persons as a group, 3,374,484 shares (11.6%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.6%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       4


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Company, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        3,374,484 shares (11.6%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    3,374,484 shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 3,374,484; for all
     reporting persons as a group, 3,374,484 shares (11.6%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.6%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       5


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Offshore, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        774,214 common shares (2.7%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    774,214
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 774,214 for all
     reporting persons as a group, 3,374,484 shares (11.6%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.6%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       6


      This  Amendment  No. 6 to  Schedule  13D  (this  "Amendment")  amends  the
below-indicated  items from the Schedule 13D previously filed by or on behalf of
the  undersigned  parties (the  "Reporting  Persons") (the "Schedule  13D"),  by
supplementing such Items with the information below:

Item 4. Purpose of Transaction

Our  proposal  that ESIO put excess cash to work to maximize  shareholder  value
seems to be  progressing.  We cite three recent  developments  to illustrate our
point.

First, and foremost, we thank ESIO's management and Board of Directors for their
constructive and timely announcement  yesterday  reiterating their commitment to
enhancing  shareholder  value.  We know  that ESIO is  working  to  prepare  its
substantive  response to our  suggestions.  As current and former public company
board members ourselves, we appreciate that doing this the right way takes time.
We are prepared to be patient while good people do the right thing.

Second,  we note  the  Schedule  13D  filed  earlier  today  by  ESIO's  largest
shareholder,  Third Avenue  Management LLC. We particularly  note the thoughtful
letter from Third Avenue's  Co-Chief  Investment  Officer,  Curtis R. Jensen, to
ESIO's CEO, Nick Konidaris,  advocating a combined share repurchase and dividend
program to improve  ESIO's return on equity (ROE) and tangibly  demonstrate  the
company's  commitment to maximizing  shareholder  value.  Though Third  Avenue's
suggestions  differ from those in our last 13D, we think they have  improved our
original ideas.

Third, we note with enthusiasm today's announcement that United Microelectronics
Corp. (UMC), which is Taiwan's second largest contract chip  manufacturer,  will
use its  excess  cash to retire  fully  30% of its  outstanding  shares  and pay
shareholders  a one time  cash  dividend.  Taiwanese  technology  companies  are
showing  American  technology  companies  how to use cash to  build  shareholder
value.

                                   * * * * *

In conclusion,  we would like to update the Schedule 13D to disclose that in two
separate recent conversations we have told ESIO's CEO and Board Chairman that we
do not  require  the  company  to use a one time  cash  dividend  as the only or
principal way to return excess cash to the shareholders.  As Mr. Jensen's letter
points  out so  powerfully,  there are other  perfectly  acceptable  ways to use
excess  cash to build  shareholder  value.  If, for  example,  ESIO's  Board and
advisors  were to conclude  that the best way to improve ROE were to  repurchase
shares, we could support that decision with just two conditions. First, we would
want  the  size of the  repurchase  program  to be  large  enough  that it would
meaningfully  boost  both ROE and  earnings  per share,  like we  believe  UMC's
program will. And, second, we would like ESIO to make a continuing commitment to
use excess cash flow to  repurchase  a  significant  percentage  of shares on an
ongoing  basis.  To illustrate the size of programs which could be acceptable to
us, we could support a one time repurchase of six million shares,  which is over
20% of the  outstanding


                                       7


share  count,  succeeded  by a  continuing  program to  repurchase  at least one
million more shares annually.

We appreciate the company's  consideration  of our views and look forward to the
response.

The previous  statements by the Reporting Persons to their views regarding their
investment in ESIO represent  solely their own analyses and judgments,  based on
publicly-available  information and their own internal evaluation thereof. Those
statements are not intended,  and should not be relied on, as investment  advice
to any other investor or prospective  investor.  To the extent those  statements
reflect  assessments of possible  future  developments,  those  assessments  are
inherently  subject to the  uncertainties  associated  with all  assessments  of
future  events;  actual  developments  may  materially  differ  as a  result  of
circumstances  affecting ESIO and/or  extrinsic  factors such as developments in
the  company's  industry and the economic  environment.  The  Reporting  Persons
reserve the right to change their internal  evaluation of this investment in the
future , as well as to increase or decrease their investment  depending on their
evaluation,  without  further  amending their Schedule 13D except as required by
applicable rules.

Item 5. Interest in Securities of the Issuer

      (a, b) The Reporting Persons, in the aggregate, beneficially own 3,374,484
common shares, constituting approximately 11.6% of the outstanding shares.

      (c) Since  Amendment  No. 5 to Schedule  13D, the  following  purchases of
Shares were made by D3 Family Funds in open market transactions:

   Fund                         Trade Date       Quantity             Price
   ----                         ----------       --------             -----
   D3 Family Fund, LP            1/18/2007         14,370             19.61
   D3 Family Bulldog Fund, LP    1/18/2007         45,570             19.61
   DIII Offshore Fund, LP        1/18/2007         15,060             19.61
   D3 Family Fund, LP            1/19/2007          5,900             19.64
   D3 Family Bulldog Fund, LP    1/19/2007         20,300             19.64
   DIII Offshore Fund, LP        1/19/2007          7,800             19.64
   D3 Family Fund, LP            1/22/2007         17,900             19.44
   D3 Family Bulldog Fund, LP    1/22/2007         64,020             19.44
   DIII Offshore Fund, LP        1/22/2007         24,080             19.44


                                       8


SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, each of the
undersigned  certifies that the  information set forth in the Statement is true,
complete and correct.

                                    D3 Family Fund, L.P., and D3 Bulldog
                                    Fund, L.P.

                                    By: Nierenberg Investment Management
                                          Company, Inc.

                                    Its: General Partner


January 24, 2007                    By: /s/ David Nierenberg
                                       -------------------------------
                                       David Nierenberg, President


                                    DIII Offshore Fund, L.P.

                                    By: Nierenberg Investment Management
                                        Offshore, Inc.

                                    Its: General Partner


January 24, 2007                    By: /s/ David Nierenberg
                                       -------------------------------
                                       David Nierenberg, President


                                    Nierenberg Investment Management
                                        Company, Inc.


January 24, 2007                    By: /s/ David Nierenberg
                                       -------------------------------
                                       David Nierenberg, President


                                    Nierenberg Investment Management
                                         Offshore, Inc.


January 24, 2007                    By: /s/ David Nierenberg
                                       -------------------------------
                                       David Nierenberg, President


                                       9