UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  Schedule 13D
                    Under the Securities Exchange Act of 1934
                                (Amendment No. 7)

                    ELECTRO SCIENTIFIC INDUSTRIES INC. (ESIO)
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                                (Name of Issuer)

                                  Common Stock
--------------------------------------------------------------------------------
                         (Title of Class of Securities)

                                    285229100
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                                 (CUSIP Number)

                                David Nierenberg
                               The D3 Family Funds
                               19605 NE 8th Street
                                 Camas, WA 98607
                                 (360) 604-8600

                                 With a copy to:

                               Henry Lesser, Esq.
                                DLA Piper US LLP
                             2000 University Avenue
                            East Palo Alto, CA 94303
                                 (650) 833-2000

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                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                 March 28, 2007
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             (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to report
the acquisition that is the subject of this Schedule 13D and is filing this
schedule because of Sections 240.13d-1(e), 240.13d-1(f) or 240.13d-1(g), check
the following box (TM).



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (entities only)

     The D3 Family Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See Instructions)
                                                                       (a)  |X|
                                                                       (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS (See Instructions)

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) or 2(e)                                         |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    585,202 Common shares (2.0%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           585,202
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 585,202; for all reporting
     persons as a group, 3,405,884  shares (11.7%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
     (See Instructions)

     (TM)
--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.7%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON (See Instructions)

     PN
--------------------------------------------------------------------------------


                                        2



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (entities only)

     The DIII Offshore Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See Instructions)
                                                                       (a)  |X|
                                                                       (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS (See Instructions)

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) or 2(e)                                         |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    802,414 common shares (2.8%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           802,414
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 802,414; for all reporting
     persons as a group, 3,405,884 shares (11.7%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
     (See Instructions)

     (TM)
--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.7%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON

     PN
--------------------------------------------------------------------------------


                                        3



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (entities only)

     The D3 Family Bulldog Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See Instructions)
                                                                       (a)  |X|
                                                                       (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS (See Instructions)

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) or 2(e)                                         |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    2,018,268 common shares (6.9%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           2,018,268
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 2,018,268; for all reporting
     persons as a group, 3,405,884 shares (11.7%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
     (See Instructions)

     (TM)
--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.7%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON

     PN
--------------------------------------------------------------------------------


                                        4



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (entities only)

     Nierenberg Investment Management Company, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See Instructions)
                                                                       (a)  |X|
                                                                       (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS (See Instructions)

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) or 2(e)                                         |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        3,405,884 shares (11.7%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    3,405,884 shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 3,405,884; for all reporting
     persons as a group, 3,405,884 shares (11.7%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
     (See Instructions)

     (TM)
--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.7%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON

     PN
--------------------------------------------------------------------------------


                                        5



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (entities only)

     Nierenberg Investment Management Offshore, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (See Instructions)
                                                                       (a)  |X|
                                                                       (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS (See Instructions)

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) or 2(e)                                         |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        802,414 common shares (2.8%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    802,414 common shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 802,414 for all reporting
     persons as a group, 3,405,884 shares (11.7%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES
     (See Instructions)

     (TM)
--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     11.7%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON

     PN
--------------------------------------------------------------------------------


                                        6



      This Amendment No. 7 to Schedule 13D (this "Amendment") amends the
below-indicated items from the Schedule 13D previously filed by or on behalf of
the undersigned parties (the "Reporting Persons") (the "Schedule 13D"), by
supplementing such Items with the information below:

ITEM 4.  PURPOSE OF TRANSACTION

We are losing  patience with ESIO as its share price  weakens.  In our view, the
company  continues to depress its return on equity (ROE), by failing to make its
excess cash work harder and smarter for its  shareholders,  and its share price,
through  ineffective   communication  with  the  financial  community.  We  have
commented on both of these issues in our prior 13D filings in December  2006 and
January 2007 and in conversations  with ESIO  representatives.  From what we can
discern  today,  little seems to be changing.  If our  perception  happens to be
wrong,  it could be because the process of change at ESIO is slow and invisible,
in which case we believe the burden is now fairly on ESIO to prove us wrong with
concrete action and persuasive communication.

On  January  22 ESIO  issued  a press  release  reaffirming  its  commitment  to
shareholder value and stating that it was considering various suggestions it had
received. Since then, however, the company has announced nothing.

In response to that  statement,  we amended our Schedule 13D to indicate,  among
other things,  that we were  prepared to be patient while the Company  evaluated
our proposal, a similar proposal from its largest stockholder and other input it
obtained.  However,  we have grown tired of waiting,  particularly  while ESIO's
share price  declines.  Therefore,  if ESIO does not publicly commit to tangible
and substantial actions to both improve ROE and upgrade the effectiveness of its
financial  communications,  we may conclude that we have no  alternative  but to
consider  nominating  our  own  candidates  for  election  to  ESIO's  board  of
directors,  in  opposition  to  the  two  incumbent  outside  directors  up  for
re-election this year, as permitted in May 2007 under ESIO's bylaws.

When we advocate "tangible and substantial"  actions to boost ROE,  specifically
we are seeking ESIO's  commitment to repurchase at least 6,000,000 of its shares
as soon as possible and an ongoing  commitment to repurchase at least  1,000,000
more shares annually from free cash flow, asset monetization, and cash reserves.
We believe  other ESIO  shareholders  would  share this  preference  for a large
repurchase,  rather than the large  special  dividend,  which we had  originally
suggested.

We view the company's  sluggish share price,  its  unacceptably low ROE, and its
ineffectual  financial  communications  as causes for  shareholder  concern  and
engagement.   The  thoughtfulness  which  ESIO  has  demonstrated   recently  in
technology,  product development,  cost reduction,  and sales and marketing does
not seem to be replicated in the  important  areas of balance sheet  management,
financial  strategy,  and investor  communications.  Despite our high regard for
ESIO's CEO, our respect for members of the company's  board,  and our enthusiasm
for ESIO's  technology,  products,  competitive  position,  and  organic  growth
prospects,  we are  frustrated  that ESIO has failed to convert  these  business
assets, and the company's obvious

                                        7



financial  assets,  into  higher ROE and a stronger  share price by the kinds of
actions advocated by its two largest shareholders.

We have been patient,  supportive, and constructive for a long time, longer than
many other  professional  investors  might have been,  out of respect for ESIO's
board and management and out of a desire not to cause unnecessary  confrontation
in the  Portland  business  community  in which we live  and  work.  But time is
running out and the time for action is now.
                                      * * *

By reporting the information contained in this Amendment,  the Reporting Persons
do not intend to solicit, nor are they soliciting, proxies or consents from, nor
seeking or  requesting  any other  action by, any of the other  stockholders  of
ESIO. The Reporting Persons have made no decisions as to whether or not they may
in the future solicit  proxies from any of the other  stockholders on any matter
that might be brought before the  stockholders nor as to whether or not any such
solicitation,  if made,  would be effected as an exempt  solicitation  under the
proxy rules of the Securities and Exchange Commission.

The previous statements as to the views of the Reporting Persons regarding their
investment in ESIO represent  solely their own analyses and judgments,  based on
publicly-available  information and their own internal evaluation thereof. Those
statements are not intended,  and should not be relied on, as investment  advice
to any other investor or prospective  investor.  To the extent those  statements
reflect  assessments of possible  future  developments,  those  assessments  are
inherently  subject to the  uncertainties  associated  with all  assessments  of
future  events;  actual  developments  may  materially  differ  as a  result  of
circumstances  affecting ESIO and/or  extrinsic  factors such as developments in
the  company's  industry and the economic  environment.  The  Reporting  Persons
reserve the right to change their internal  evaluation of this investment in the
future,  as well as to increase or decrease their investment  depending on their
evaluation,  without  further  amending their Schedule 13D except as required by
applicable rules.

ITEM 5. INTEREST IN SECURITIES OF THE ISSUER

      (a, b) The Reporting Persons, in the aggregate, beneficially own 3,405,884
common shares, constituting approximately 11.7% of the outstanding shares.

      (c) Since  Amendment  No. 6 to Schedule  13D, the  following  purchases of
Shares were made by D3 Family Funds in open market transactions:

FUND                         TRADE DATE   QUANTITY   PRICE
----                         ----------   --------   -----
DIII Offshore Fund, LP        3/27/2007     25,000   18.75
D3 Family Bulldog Fund, LP    3/28/2007      3,270   18.55
DIII Offshore Fund, LP        3/28/2007      3,260   18.55


                                        8



SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, each of the
undersigned  certifies that the  information set forth in the Statement is true,
complete and correct.

                                       D3 Family Fund, L.P., and D3 Bulldog
                                         Fund, L.P.

                                       By: Nierenberg Investment Management
                                           Company, Inc.

                                       Its: General Partner

March 29, 2007                         By: /s/ David Nierenberg
------------------                         -------------------------------
                                               David Nierenberg, President

                                         DIII Offshore Fund, L.P.

                                         By: Nierenberg Investment Management
                                             Offshore, Inc.

                                         Its: General Partner

March 29, 2007                         By: /s/ David Nierenberg
------------------                         -----------------------------------
                                               David Nierenberg, President

                                       Nierenberg Investment Management
                                         Company, Inc.

March 29, 2007                         By: /s/ David Nierenberg
------------------                         -----------------------------------
                                               David Nierenberg, President

                                       Nierenberg Investment Management
                                         Offshore, Inc.

March 29, 2007                         By: /s/ David Nierenberg
------------------                         -----------------------------------
                                               David Nierenberg, President


                                        9