Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Haris Clinton M.
 2. Date of Event Requiring Statement (Month/Day/Year)
06/13/2016		 3. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG]
(Last)
(First)
(Middle)
C/O ENTEGRIS, INC., 129 CONCORD ROAD		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Sr. V.P/G.M. Liquid Filtration
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

BILLERICA, MA 01879		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 23,834.82 (1) (2)
D
 

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Haris Clinton M.
C/O ENTEGRIS, INC.
129 CONCORD ROAD
BILLERICA, MA 01879		       Sr. V.P/G.M. Liquid Filtration  

Signatures

/s/ Sue Lee, Attorney-In-Fact for Clint Haris 06/23/2016
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) These shares include a total of 19,542 restricted stock units granted on October 7, 2014, February 10, 2015 and February 24, 2016 with restrictions that lapse as follows: (i) 2,022 shares vest on November 15, 2016, (ii) 3,809 shares vest on February 19, 2017, (iii) 2,022 shares vest on November 15, 2017, (iv) 3,809 shares vest on February 19, 2018, (v) 2,022 shares vest on November 15, 2018, (vi) 3,809 shares vest on February 19, 2019, and (vii) 2,049 shares vest on February 19, 2020.
(2) These shares include 1,833.82 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan.

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