SECURITIES AND EXCHANGE COMMISSION
                            Washington, D.C. 20549
                            ______________________

                                   FORM 6-K

                          REPORT OF A FOREIGN ISSUER
                       PURSUANT TO RULE 13A-16 OR 15D-16
                    OF THE SECURITIES EXCHANGE ACT OF 1934
                          for the month of March 2003

                            ______________________

                               ASML Holding N.V.

                                  De Run 1110
                               5503 LA Veldhoven
                                The Netherlands
                   (Address of principal executive offices)
                            ______________________

Indicate by check mark whether the registrant files or will file annual
reports under cover of Form 20-F or Form 40-F.

                      Form 20-F /X/      Form 40-F  /_/

Indicate by check mark whether the registrant by furnishing the information
contained in this Form is also thereby furnishing the information to the
Commission pursuant to Rule 12g3-2(b) under the Securities Exchange Act of
1934.

                          Yes  /_/          No /X/

If ''Yes'' is marked, indicate below the file number assigned to the
registrant in connection with Rule 12g3-2(b):

THIS REPORT ON FORM 6-K SHALL BE DEEMED TO BE INCORPORATED BY REFERENCE IN THE
PROSPECTUS INCLUDED IN THE REGISTRATION STATEMENT ON FORM F-3 (FILE NO.
333-83266) OF ASML HOLDING N.V.


Exhibit

99.1     "ASML Discloses Results of Annual Shareholder Meeting.
         Provides 2002 Financial Information by Quarter,"
         dated March 26, 2003.

         "Safe Harbor" Statement under the U.S. Private Securities Litigation
Reform Act of 1995: the matters discussed in this document may include
forward-looking statements that are subject to risks and uncertainties
including, but not limited to, economic conditions, product demand and
industry capacity, competitive products and pricing, manufacturing
efficiencies, new product development, ability to enforce patents,
availability of raw materials and critical manufacturing equipment, trade
environment, and other risks indicated in filings with the U.S. Securities and
Exchange Commission.


                                  SIGNATURES

         Pursuant to the requirements of the Securities Exchange Act of 1934,
the registrant has duly caused this report to be signed on its behalf by the
undersigned, thereunto duly authorized.

                                           ASML HOLDING N.V. (Registrant)

Date:  March 26, 2003                      By:    /s/ Peter T.F.M. Wennink
                                              --------------------------------
                                                  Peter T.F.M. Wennink
                                                  Executive Vice President
                                                  and Chief Financial Officer