1. Title of Derivative Security (Instr. 4) |
2. Date Exercisable and Expiration Date (Month/Day/Year) |
3. Title and Amount of Securities Underlying Derivative Security (Instr. 4) |
4. Conversion or Exercise Price of Derivative Security |
5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5) |
6. Nature of Indirect Beneficial Ownership (Instr. 5) |
Date Exercisable |
Expiration Date |
Title |
Amount or Number of Shares |
Stock Options (right to buy)
|
Â
(1)
|
12/09/2018 |
Amtech Systems, Inc. $.01 par value common stock
|
3,884
(2)
|
$
3.8
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(3)
|
11/20/2019 |
Amtech Systems, Inc. $.01 par value common stock
|
2,667
|
$
6.15
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(4)
|
08/06/2020 |
Amtech Systems, Inc. $.01 par value common stock
|
1,333
|
$
10.64
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(5)
|
12/15/2021 |
Amtech Systems, Inc. $.01 par value common stock
|
5,000
|
$
7.98
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(6)
|
12/11/2022 |
Amtech Systems, Inc. $.01 par value common stock
|
9,938
(7)
|
$
2.95
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(8)
|
12/12/2023 |
Amtech Systems, Inc. $.01 par value common stock
|
5,000
|
$
7.01
|
D
|
Â
|
Stock Options (right to buy)
|
Â
(9)
|
11/19/2024 |
Amtech Systems, Inc. $.01 par value common stock
|
2,500
|
$
9.98
|
D
|
Â
|
* |
If the form is filed by more than one reporting person, see Instruction 5(b)(v). |
** |
Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a). |
(1) |
Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/09/2008 grant date. |
(2) |
Reporting person has exercised 5,116 of the 9,000 vested options. |
(3) |
Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 11/20/2009 grant date. |
(4) |
Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 08/06/2010 grant date. |
(5) |
Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/15/2011 grant date. |
(6) |
Stock options vest one-fourth (1/4) annually commencing on the first anniversary of the 12/11/2012 grant date. |
(7) |
Reporting person has exercised 1,000 of the 10,938 vested options. |
(8) |
Stock options vested one-half (1/2) annually commencing on the first anniversary of the 12/12/2013 grant date. |
(9) |
Stock options vest one-half (1/2) annually commencing on the first anniversary of the 11/19/2014 grant date. |