Laser Focus World is an industry bedrock—first published in 1965 and still going strong. We publish original articles about cutting-edge advances in lasers, optics, photonics, sensors, and quantum technologies, as well as test and measurement, and the shift currently underway to usher in the photonic integrated circuits, optical interconnects, and copackaged electronics and photonics to deliver the speed and efficiency essential for data centers of the future.

Our 80,000 qualified print subscribers—and 130,000 12-month engaged online audience—trust us to dive in and provide original journalism you won’t find elsewhere covering key emerging areas such as laser-driven inertial confinement fusion, lasers in space, integrated photonics, chipscale lasers, LiDAR, metasurfaces, high-energy laser weaponry, photonic crystals, and quantum computing/sensors/communications. We cover the innovations driving these markets.

Laser Focus World is part of Endeavor Business Media, a division of EndeavorB2B.

Laser Focus World Membership

Never miss any articles, videos, podcasts, or webinars by signing up for membership access to Laser Focus World online. You can manage your preferences all in one place—and provide our editorial team with your valued feedback.

Magazine Subscription

Can you subscribe to receive our print issue for free? Yes, you sure can!

Newsletter Subscription

Laser Focus World newsletter subscription is free to qualified professionals:

The Daily Beam

Showcases the newest content from Laser Focus World, including photonics- and optics-based applications, components, research, and trends. (Daily)

Product Watch

The latest in products within the photonics industry. (9x per year)

Bio & Life Sciences Product Watch

The latest in products within the biophotonics industry. (4x per year)

Laser Processing Product Watch

The latest in products within the laser processing industry. (3x per year)

Get Published!

If you’d like to write an article for us, reach out with a short pitch to Sally Cole Johnson: [email protected]. We love to hear from you.

Photonics Hot List

Laser Focus World produces a video newscast that gives a peek into what’s happening in the world of photonics.

Following the Photons: A Photonics Podcast

Following the Photons: A Photonics Podcast dives deep into the fascinating world of photonics. Our weekly episodes feature interviews and discussions with industry and research experts, providing valuable perspectives on the issues, technologies, and trends shaping the photonics community.

Editorial Advisory Board

  • Professor Andrea M. Armani, University of Southern California
  • Ruti Ben-Shlomi, Ph.D., LightSolver
  • James Butler, Ph.D., Hamamatsu
  • Natalie Fardian-Melamed, Ph.D., Columbia University
  • Justin Sigley, Ph.D., AmeriCOM
  • Professor Birgit Stiller, Max Planck Institute for the Science of Light, and Leibniz University of Hannover
  • Professor Stephen Sweeney, University of Glasgow
  • Mohan Wang, Ph.D., University of Oxford
  • Professor Xuchen Wang, Harbin Engineering University
  • Professor Stefan Witte, Delft University of Technology

JSR Corporation/Inpria Corporation and Lam Research Enter Cross Licensing and Collaboration Agreement to Advance Semiconductor Manufacturing



TOKYO, Sept 16, 2025, FREMONT, Calif., Sept 15, 2025 - (JCN Newswire) - JSR Corporation, a leading technology company focused on material innovation and the parent company of Inpria Corporation, a metal oxide photoresist solution provider, Lam Research Corp. (Nasdaq: LRCX), a global leader in semiconductor fabrication equipment and services, today announced that JSR/Inpria and Lam have entered into a non-exclusive cross-licensing and collaboration agreement to advance leading-edge semiconductor manufacturing. The partnership is intended to accelerate the industry’s transition to next-generation patterning, including dry resist technology for EUV lithography, and advance the development of next-generation materials for atomic layer etching and deposition processes.

The agreement capitalizes on JSR/Inpria’s innovative semiconductor materials, including metal oxide solutions and Lam’s deep capabilities in deposition, etch and EUV patterning, including Aether®, Lam’s ground-breaking dry resist equipment and process technology that reduces the cost and complexity of creating the intricate patterns required for chips for artificial intelligence (AI) and high-performance computing (HPC).

The companies will collaborate to integrate JSR/Inpria’s patterning resists and films with Lam’s etch and dry resist deposition technologies. Lam and JSR/Inpria will also work together to expand innovation in several areas to support chipmakers as they scale in the AI era, including research and development related to metal oxide resists, high NA EUV patterning for advanced nodes, and other advanced films for next-generation patterning. In addition, leveraging JSR’s recent acquisition of Yamanaka Hutech Corporation, Lam and JSR plan to explore on new precursor materials and processes for advanced atomic layer deposition and etch solutions.

“At JSR, we are committed to advancing cutting edge materials to enable our customers’ most demanding technology roadmaps,” said Toru Kimura, senior officer, JSR Corporation. “By combining JSR and Inpria’s materials expertise with Lam’s strengths in deposition, etch, and dry resist technologies, we aim to accelerate solutions for EUV lithography – including high NA – and support the industry to scale efficiently for the new AI era.

“By richly complementing Lam’s proven atomic layer deposition and etch capabilities with JSR’s deep expertise in advanced patterning materials, this collaboration enables us to accelerate innovation at a time of rising semiconductor complexity,” said Vahid Vahedi, chief technology and sustainability officer, Lam Research. “This includes driving new low-NA and high-NA EUV patterning materials and metal oxide resists and providing greater access to Aether dry resist technology.”

Inpria and Lam have also agreed to dismiss all claims against each other in the litigation Inpria v. Lam Research (Case 1:22cv01359) in the District Court of Delaware and all related inter partes review (IPR) proceedings.

About JSR Corporation

JSR Corporation is a global technology company developing cutting-edge materials. Our Electronic Materials business provides a wide range of semiconductor materials for advanced logic and memory, including photoresists and ancillaries, process materials such as CMP slurries, cleaning solutions, packaging materials, and precursors. JSR's Electronic Materials Division’s group companies include Inpria Corporation, acquired in 2021 for EUV metal oxide resists, and Yamanaka Hutech, added in August 2024 for high-purity CVD/ALD precursors. JSR delivers high-quality materials with added functionality, driving innovation in the semiconductor market and enabling customer breakthroughs. Please visit www.jsr.co.jp

About Lam Research

Lam Research Corporation is a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Lam’s equipment and services allow customers to build smaller and better performing devices. In fact, today, nearly every advanced chip is built with Lam technology. We combine superior systems engineering, technology leadership, and a strong values-based culture, with an unwavering commitment to our customers. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, Calif., with operations around the globe. Learn more at www.lamresearch.com.

JSR Corporation Contacts:
Yuki Kawashima
Electronic Materials Business Strategy Dept.
Tel: +81-3-6218-3500
e-mail: litho_semi@jsr.co.jp

Lam Research Contacts:
Laura Bakken
Media Relations
Tel: +1 (510) 572-5029
e-mail: publicrelations@lamresearch.com

Ram Ganesh
Investor Relations
Tel: +1 (510) 572-1615
Email: investor.relations@lamresearch.com

]]>

Source: JSR Corporation

Copyright 2025 JCN Newswire . All rights reserved.

Stock Quote API & Stock News API supplied by www.cloudquote.io
Quotes delayed at least 20 minutes.
By accessing this page, you agree to the following
Privacy Policy and Terms Of Service.