• Forge Nano’s 200 mm single-wafer, thermal atomic layer deposition (ALD) platform for compound semiconductor manufacturing to be unveiled in Taipei
• Tool build slots available with delivery expected in Q1 2026

DENVER, Sept. 04, 2025 (GLOBE NEWSWIRE) -- Forge Nano, Inc., a technology company pioneering domestic battery and semiconductor innovations, today announced it is unveiling a new commercial single module semiconductor wafer fab atomic layer deposition (ALD) tool – TEPHRA^One. The fully automated 200 mm single module platform is outfitted with features from Forge Nano’s flagship multi-process module TEPHRA in a streamlined configuration for oxide, nitride, metal and nanolaminate coatings.

TEPHRA^One 200 mm single module commercial ALD tool.

"TEPHRA^One is our answer to the growing demand for commercial ALD coating speeds in a single module configuration,” said Paul Lichty, CEO of Forge Nano. “With the same high-speed deposition rates and unmatched chemical utilization as our multi-module TEPHRA, TEPHRA^One allows customers with singular coating needs to save critical floor space without sacrificing throughput and quality."

TEPHRA^One is equipped to deposit oxide, nitride or nanolaminates at up to 12 nanometers per minute, while utilizing up to 90% of loaded chemical precursor, to deliver single wafer coatings at batch speeds. The commercial tool includes fast pneumatic valves and in-situ reactor pressure control enabling sub-second coating cycles. Forge Nano’s catalyzed thermal ALD process is utilized in TEPHRA^One to enable high aspect ratio processing desired by RF device, MEMs & sensors and LED & photonics applications.

Forge Nano will be showcasing TEPHRA^ONE at SEMICON Taiwan, taking place in Taipei from September 10-12. To learn more, stop by the Forge Nano booth (#R7219) located on the 4^th floor of TaiNEX 2 or download the equipment brochure here.

For more information about Forge Nano, please visit www.forgenano.com.

About Forge Nano

Forge Nano is a technology company pioneering domestic battery and semiconductor innovations using its platform technology, Atomic Armor. Atomic Armor is a scalable, adaptable nano-scale coating system that strengthens America’s most critical systems – at the atomic level. The superior surface coatings produced by our Atomic Armor™ process allow our partners to unlock peak performance. Learn more at https://www.forgenano.com

Media Contact:
Will McKenna
Brand Communications Director
Forge Nano
wmckenna@forgenano.com
(720) 432-6669

A photo accompanying this announcement is available at https://www.globenewswire.com/NewsRoom/AttachmentNg/07986977-fe3b-46ef-a021-0b72e11829ca